| 
					规格(mm)
				 | 
					相邻两侧面垂直度(um)
				 | 
					测量面直线度(um)
				 | 
					相对测量面平行度(um)
				 | |||
| 
					精度等级(um)
				 | ||||||
| 
					00
				 | 
					0
				 | 
					00
				 | 
					0
				 | 
					00
				 | 
					0
				 | |
| 
					160×160
				 | 
					2
				 | 
					4
				 | 
					0.8
				 | 
					1.7
				 | 
					2
				 | 
					4
				 | 
| 
					200×200
				 | 
					2
				 | 
					4
				 | 
					0.9
				 | 
					1.8
				 | 
					2
				 | 
					4
				 | 
| 
					300×300
				 | 
					2.6
				 | 
					5.2
				 | 
					1.1
				 | 
					2.3
				 | 
					2.6
				 | 
					5.5
				 | 
| 
					400×400
				 | 
					3
				 | 
					6
				 | 
					1.3
				 | 
					2.3
				 | 
					3
				 | 
					6
				 | 
| 
					500×500
				 | 
					3.5
				 | 
					7
				 | 
					1.5
				 | 
					3
				 | 
					3.5
				 | 
					7
				 | 
| 
					600×600
				 | 
					4.5
				 | 
					9
				 | 
					2
				 | 
					4
				 | 
					4.5
				 | 
					9
				 | 
| 
					800×800
				 | 
					5
				 | 
					10
				 | 
					3
				 | 
					6
				 | 
					5
				 | 
					10
				 |